The surface of the cross-sectional shape or three-dimensional surface shape measuring apparatus and a scanning electron microscope

摘要

PROBLEM TO BE SOLVED: To provide a surface cross-sectional shape or three-dimensional surface shape measuring apparatus for measuring the cross-sectional shape or three- dimensional shape of a surface formed on the surface of a sample to be measured with few errors.;SOLUTION: The surface of the sample is irradiated with incident electrons, and the shape of the sample to be measured is measured on the basis of emission electrons which occur from the sample in the surface cross-sectional shape or three-dimensional surface shape measuring apparatus. The apparatus is provided with a detector arranged at a predetermined location for measuring a shape by detecting emission electrons passed inside an object lens among the emission electrons which occurs from the sample.;COPYRIGHT: (C)2003,JPO