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high frequency plasmaverfahren and the plasma by inductive structure is suggested in which the phase and antiphasekomponenten of capacitive flows between the inductive structure and the plasma are balanced
high frequency plasmaverfahren and the plasma by inductive structure is suggested in which the phase and antiphasekomponenten of capacitive flows between the inductive structure and the plasma are balanced
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机译:建议高频等离子体和感应结构的等离子体,其中感应结构和等离子体之间的电容流动的相和反相平衡。
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摘要
A process for fabricating a product including the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generated by a plasma excited by a high frequency field provided by an inductive coupling structure in which the phase and anti-phase capacitive currents into the plasma are substantially balanced.
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