Capacitive-inductive transition and related optical plasma structure driven by a single turn radiofrequency current coil

摘要

Inductively coupled plasmas(ICPs) driven by an external radiofrequency (rf) current coil have a variety of applications under a wide range of operating conditions, for example, in gas pressure, which is distributed from mTorr to atomspheric pressure. At low pressure from a few mTorr to hundreds of mTorr, ICP is used as a low temperature plasma source for device fabrication in etching, deposition and surface modification etc... . It is known that there are two modes to maintain the plasma driven by rf current. One is a capacitively coupled mode (E-mode) at lower pressure, and the other is an inductively coupled one (H-mode)[1]. The transition between both of modes was investigated mainly from the electrical characteristics in the system. We have no information of 3D plasma structure between both modes as far as we know.