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A HIGH-FREQUENCY PLASMA PROCESS WHEREIN THE PLASMA IS EXCITED BY AN INDUCTIVE STRUCTURE IN WHICH THE PHASE AND ANTI-PHASE PORTIONS OF THE CAPACITIVE CURRENTS BETWEEN THE INDUCTIVE STRUCTURE AND THE PLASMA ARE BALANCED
A HIGH-FREQUENCY PLASMA PROCESS WHEREIN THE PLASMA IS EXCITED BY AN INDUCTIVE STRUCTURE IN WHICH THE PHASE AND ANTI-PHASE PORTIONS OF THE CAPACITIVE CURRENTS BETWEEN THE INDUCTIVE STRUCTURE AND THE PLASMA ARE BALANCED
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机译:感应结构激发等离子体的高频过程,其中感应结构和等离子体之间的电容电流的相和反相部分是平衡的
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摘要
A process for fabricating a product including the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generated by a plasma excited by a high frequency field provided by an inductive coupling structure in which the phase and anti-phase capacitive currents into the plasma are substantially balanced.
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