'A high-frequency plasma process in which the plasma is excited by an inductive structure in which the phase and the inverse-phase portion of the capacitive current between the inductive structure and the plasma are balanced

摘要

It is the process of manufacturing the product. The process includes exposing the substrate to a composition of an entity, wherein at least one of the entities is coupled to a voltage of the inductive coupling structure by a high frequency field in which the vector sum of capacitively coupled phase and reverse phase is substantially balanced It emits from the chemical species produced by the excited gas discharge.