Image pickup device and defective survey instrument of photo mask

摘要

Abstract Topic The image pickup equipment which possesses more high resolution and signal-noise ratioThe position and the photo mask defective survey instrument are offered. Solutions At the time of this inventing, rainkonhuokaThe above-mentioned purpose is achieved by utilizing ru optical system.Namely, illuminant (1) on the front sample (6) portable directionIn the direction which crosses extending 1st it possesses the multiple slits which are presentTo lay out the spatial filter (3), the sample (6) the line illuminationIt does. As for transmitted light or reflected light from sample 1st three-dimensional fillta (3) 2nd three-dimensional hui which possesses the slit which almost is identicalThrough ruta (10,15), the image detector (11,16)It absorbs light with. As for image detector in two-dimensional array condition arrayThe re it is to possess the light absorbent component, the electric charge which is accumulated to each light absorbent component 1It transfers to every line. With this invention, electric charge revolution of image detectorGive the relation of correspondence with sending speed and travel speed of the sample, testAccumulating the electric charge where charge illuminates, the multiple times occurs with each illuminationIt does, it outputs the electric charge which adds. This way it constitutes denselyWith by, when rainkonhuokaru optical system is formedTogether, more mass electric charge accumulates with the line illumination of the multiple timesIt is done, also signal-noise ratio improves markedly.