The image pickup device and defective survey instrument null image pickup

摘要

PROBLEM TO BE SOLVED: To provide an imaging apparatus that is capable of high-speed scanning, and to provide a defect-inspecting apparatus of photomasks.;SOLUTION: The imaging apparatus has a configuration for composing a line confocal optical system and for performing a plurality of line illumination. Especially, a diffraction grating 32 generates m×n subbeams. Further, the m×n subbeams are deflected so that they can be continued by an acoustic optical element 33. As a result, since beams are scanned by the m×n subbeams, scanning can be completed quickly.;COPYRIGHT: (C)2004,JPO