METHOD OF MANUFACTURING THIN FILM BY YAG FIFTH HARMONIC PULSE LASER VAPOR DEPOSITION, AND ITS APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film by a YAG fifth harmonic pulse laser vapor deposition, and its apparatus.;SOLUTION: In the manufacturing method and its apparatus, crystalline and amorphous thin films of a target substance, a thin film of a device pattern, and its laminated thin film are manufactured by successively implementing by the predetermined pulse number a first step in which harmonics different in wavelength of the pulse laser such as Nd: YAG are coupled with each other, and only the fifth harmonic short in wavelength is separated, and a second step in which the separated fifth harmonic is converged and irradiated on a target by using a lens, the target substance is decomposed and evaporated in a pulse manner, and collided on a substrate as it is or through a mark for device pattern, and successively implementing the operation for a plurality of targets.;COPYRIGHT: (C)2001,JPO