JIG FOR ETCHING, AND APPARATUS AND METHOD FOR ETCHING

摘要

PROBLEM TO BE SOLVED: To prevent the destruction of an etched object held by a jig for etching even if the object is dipped in a high temperature etchant when etching the object using the jig for etching which holds the object, so that one surface of the flat etched object may face an airtight space and the other surface may be brought into contact with the etchant. ;SOLUTION: The jig for etching holds the flat etched object 20 so that one surface 22 may face an airtight space S and the other surface 21 may be brought into contact with an etchant 30. The volume of the airtight space can be changed.;COPYRIGHT: (C)2001,JPO