WORKING DEVICE AND WORKING METHOD FOR MATERIAL USING ULTRAVIOLET RAY OR LIGHT OF WAVELENGTH SHORTER THAN ULTRAVIOLET RAY

摘要

PROBLEM TO BE SOLVED: To allow desired working of three-dimensional shapes varying in working depths and to execute working with the lessened influence that the shape of a transmission part exerts on the working shapes.;SOLUTION: This device has an SR light source 1 which radiates X-rays of SR light, an X-ray mask which has the transmission part of the prescribed shape allowing the transmission of the X-rays radiated from the SR light source 1 and a stage 3 for exposure which relatively moves the X-ray mask and the working material in order to vibrate a region where the material is irradiated with the X-rays transmitted through the transmission port by relatively moving the X-ray mask and the material according to the moving patterns determined in accordance with the working shape of the working material. The speed of the vibration by the stage 3 for exposure is higher than the speed of the movement. The material is exposed with the exposure distribution meeting the working shape by the relative movement and the errors of the shape of the transmission port are averaged in the region where the material is irradiated with the X-rays transmitted through the transmission port by the relative vibration.;COPYRIGHT: (C)2001,JPO