SHORT WAVELENGTH LIGHT SOURCE DEVICE OF EXTREME ULTRAVIOLET LIGHT OR SOFT X-RAY RANGE, AND METHOD FOR GENERATING SHORT WAVELENGTH LIGHT OF EXTREME ULTRAVIOLET LIGHT OR SOFT X-RAY RANGE

摘要

PROBLEM TO BE SOLVED: To provide a simply structured low-cost light source device capable of outputting a high average soft X-ray.;SOLUTION: The soft X-ray source device (2) comprises a liquid target supplying device (13) for supplying a liquid target (T) including medium for generating the soft X-ray to a laser irradiated region (A); and a pair of reflective optical members (11, 12) arranged facing each other so as to sandwich the region (A), having a plurality of laser beam reflecting mirrors (11b1 to 11b12, 12b1 to 12b12), sequentially reflecting and reciprocating a laser beam (L) for excitation between the optical members (11, 12) by the mirrors (11b1 to 11b12, 12b1 to 12b12), and making the laser beam pass through the region (A) more than once.;COPYRIGHT: (C)2007,JPO&INPIT