SEMICONDUCTOR DEVICE HAVING FUNCTION FOR PREVENTING MOISTURE FROM PENETRATING FUSE PART AND MANUFACTURING METHOD OF FUSE PART

摘要

PURPOSE: A semiconductor device having a function for preventing moisture from penetrating to a fuse part is provided to effectively prevent moisture from penetrating through an interface between interlayer dielectric, by forming a guard ring with an uppermost interconnection metal composed of a multilayered metal interconnection and a passivation layer. CONSTITUTION: A guard ring(142') is a ring shape surrounding a fuse opening part(A), and prevents impurities from penetrating from the fuse opening part. An etch stop layer(134') is formed under at least the guard ring of a fuse line(124). A plurality of interlayer dielectrics is formed on the entire surface located on the etch stop layer, and the guard ring and the fuse opening part are formed in the interlayer dielectrics. A passivation layer(144) is formed on the entire substrate including the guard ring and the plurality of interlayer dielectrics, and exposes the fuse opening part. The guard ring is vertically extended from the etch stop layer to an uppermost interconnection region of a multilayered metal interconnection.