A probe card having a needle-shaped probe elastically supported by a rigid substrate, and a method for manufacturing the same

摘要

The probe card of the present invention is used in a test apparatus for connecting a test apparatus to an electrode of an integrated circuit device, and is a needle-shaped conductive material provided on an elastic layer 21c supported by a ceramic substrate 21b in the form of a cantilever. By providing the probe 27, the needle-shaped conductive probe absorbs irregularities in the electrode.