The method of scanning the pulsed laser beam for surface excision

摘要

(57) Abstract Being fast, smooth scan, is stated in order to achieve the uniform excision surface without depending on the same period with laser pulse and scanner mirror position. Scan takes the consecutive closed loop, scan rate on each loop fine is adjusted in accordance with the around length of the loop. Being uniform alongside each loop, as for the pulse arrangement which it stuffs densely, it can be achieved by the continual scan of the plural times which parallel to way and the loop where it can be distant the pulse train of scan sufficiently. Scan pattern is designed, number of layers increasing, energy distribution being uniform in every layer, as fineness of the excision aspect does not continue to change substantially.