The soft film and the carrier head for the chemical mechanical polishing device which possesses the flexible backing component

摘要

(57) Abstract The chemical mechanical polishing device (20) the carrier head of business (100), the soft film (118) we include, the underside provides the substrate receipt surface. The carrier head (100), the soft film (118) contacting the surface, the multiple electrolysis cells which raise the vacuum chuck of the substrate (194) the flexible backing component which it possesses (106) it includes.