METHOD OF ADJUSTING RESISTANCE OF THIN FILM RESISTOR AND LASER DIODE MODULE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a thin film resistor resistance adjusting method which hardly fuses the resistance thin film of a thin film resistor by overheating and a laser diode module using the thin film resistor.;SOLUTION: Electrode thin films 4 and 5 are provided at ends of a resistance thin film 2. Laser scanning lines 6a and 6c formed along a boundary line between the resistance thin film 2 and the electrode thin films 4 and 5, respectively, and another laser scanning line 6b formed extending from the edge of the electrode thin film 4 to the edge of the electrode thin film 5 in the longitudinal direction of the resistance thin film 2, are connected to form a square region 3 electrically isolated from the resistance thin film 2, by which a resistance thin film of the same width and formed integrally is newly formed to adjust a resistance value.;COPYRIGHT: (C)2002,JPO