Ag BASED THIN FILM AND SPUTTERING TARGET FOR DEPOSITING Ag BASED THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide an Ag based thin film which is useful for the formation of an electrode, wiring, a reflection film, a reflecting electrode, or the like, in PFD, or the like, has excellent film adhesion and durability, and further has low resistance and high reflectivity, and an easily producible sputtering target for depositing the Ag based thin film.;SOLUTION: The Ag based thin film has a composition consisting essentially of Ag, and containing an electrically conductive oxide. The thin film has low electric resistance.;COPYRIGHT: (C)2002,JPO