Apparatus for manufacturing semiconductor device, method for manufacturing semiconductor device, inspection apparatus for semiconductor device, and inspection method for semiconductor device

摘要

An incomplete circuit pattern is formed. The incomplete circuit pattern includes a circuit targeted for inspection in said product semiconductor device and the other circuit of said product semiconductor device which is not targeted for inspection and in which at least an arbitrary portion of the other circuit is missing. The product semiconductor device will become a product. Then, arbitrary circuit pattern is coupled with the missing portion to form an inspection semiconductor device. The inspection semiconductor device is used to inspect the product semiconductor device.