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Mitigation of deleterious effects of micropipes in silicon carbide devices
Mitigation of deleterious effects of micropipes in silicon carbide devices
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机译:减轻碳化硅设备中微管的有害影响
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摘要
The invention includes a semiconductor device, comprising a silicon carbide substrate comprising micropipes, wherein the micropipes are filled with a dielectric, and a method of making such a device.
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