Attenuation of light in optical beam path, involves adjustable diffraction, special optical diffraction grid, optical element that detects preferred diffraction order are arranged in beam path

摘要

The method involves adjustable diffraction of the light. A special optical diffraction grid and an optical element that detects the preferred diffraction order are arranged in the optical beam path of light produced by a light source. The grid has regionally separate periodic structure units of a diffractive nature and has a rectangular, saw tooth, trapezoidal, sinusoidal or other profile. Independent claims are also included for the following: a device for implementing the method, the use of the device in transmission or reflection, its use as a gray tone mask in laser technology and its use as a mask for imaging onto a workpiece.