X-RAY SPECTROSCOPY ELEMENT AND FLUORESCENT X-RAY ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an X-ray spectroscopy element and the like, capable of producing primary X-rays in which integrated intensity is sufficiently high and properly monochronized.;SOLUTION: The X-ray spectroscopic element 4 is used for irradiating primary X-rays 5 to a sample 1 by separating X-rays 2, generating from an X-ray source 3 into spectrum in fluorescent X-ray analysis and is constituted, by layering a multitude of layer pairs consisting of a reflection layer 4a and a spacer layer 4b on a substrate 4c. A plurality of multiple layer films 4e, consisting of a single or a plurality of layer pairs having a specific period length (d), are provided. The closer the substrate 4c is set to the multiple layer film 4e, the smaller the specific period length (d) is set.;COPYRIGHT: (C)2003,JPO