METHOD FOR PRODUCING NANOCARBON AND NANOCARBON PRODUCED USING THE SAME, COMPOSITE MATERIAL OR MIXED MATERIAL EACH CONTAINING NANOCARBON AND METALLIC FINE PARTICLES, DEVICE FOR PRODUCING NANOCARBON, METHOD FOR FORMING PATTERN OF NANOCARBON AND PATTERNED NANOCARBON SUBSTRATE USING THE SAME, AND ELECTRON EMISSION SOURCE USING PATTERNED NANOCARBON SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming electron emission source by depositing on a substrate a soot which is formed through evaporating a material exposed to an arc discharge, which is mainly composed of a carbon, by the arc discharge through using an arc torch for welding or a device having a structure similar to that of the arc torch without necessarily requiring process containers or the like, and also to provide a device used for the same. ;SOLUTION: A torch electrode 10, which is a first electrode, of an arc torch 1 and the material 2 to be exposed to the arc discharge, which is a second electrode, of a graphite plate are arranged to face each other. An arc discharge is generated by applying a potential between the torch electrode 10 and the end of the material 2 exposed to the arc discharge, and the graphite on the end of the arc material 2 to be exposed to the arc discharge is evaporated to form a soot. The generated soot is deposited on the surface of the substrate opposed to an arc discharge region, through a mask having a patterned opening.;COPYRIGHT: (C)2003,JPO