METHOD FOR MANUFACTURING NANOCARBON MATERIAL COMPOSITE SUBSTRATE, NANOCARBON MATERIAL COMPOSITE SUBSTRATE, AND ELECTRON EMISSION ELEMENT

摘要

PPROBLEM TO BE SOLVED: To provide a method for manufacturing a nanocarbon material composite substrate which can pattern and arrange a nanocarbon material on a substrate to manufacture a nanocarbon material composite substrate. PSOLUTION: The method for manufacturing the nanocarbon material composite substrate includes the steps of: supporting catalyst on the substrate; heat treating the catalyst; forming a three-dimensional structural pattern on the substrate; and growing a nanocarbon material on the surface of the substrate on which the catalyst is supported, by means of the solid-liquid interface decomposition method. Because the three-dimensional structural pattern is formed on the substrate after the support of the catalyst, the catalyst can be left selectively on the upper surface of a convexity portion, which allows the nanocarbon material to be selectively formed thereon. Therefore, preferably, the nanocarbon material composite substrate in which the nanocarbon material is patterned and arranged on the substrate is manufactured. PCOPYRIGHT: (C)2010,JPO&INPIT