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Microelectronic fabrication with upper lying aluminum fuse layer in copper interconnect semiconductor technology and method for fabrication thereof
Microelectronic fabrication with upper lying aluminum fuse layer in copper interconnect semiconductor technology and method for fabrication thereof
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机译:铜互连半导体技术中具有上层铝熔丝层的微电子制造及其制造方法
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摘要
Within both a microelectronic fabrication and a method for fabricating the microelectronic fabrication, there is employed at least one fuse layer electrically connected with a series of patterned conductor layers separated by a series of dielectric layers, where the at least one fuse layer is formed at a level no lower than a highest of the series of patterned conductor layers within the microelectronic fabrication. When formed within the context of the foregoing constraint, there is provided enhanced access for actuation of the at least one fuse layer within the microelectronic fabrication.
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