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Microelectronic fabrication with upper lying aluminum fuse layer in copper interconnect semiconductor technology and method for fabrication thereof

机译:铜互连半导体技术中具有上层铝熔丝层的微电子制造及其制造方法

摘要

Within both a microelectronic fabrication and a method for fabricating the microelectronic fabrication, there is employed at least one fuse layer electrically connected with a series of patterned conductor layers separated by a series of dielectric layers, where the at least one fuse layer is formed at a level no lower than a highest of the series of patterned conductor layers within the microelectronic fabrication. When formed within the context of the foregoing constraint, there is provided enhanced access for actuation of the at least one fuse layer within the microelectronic fabrication.
机译:在微电子制造和用于制造微电子制造的方法两者中,采用至少一个熔丝层,该熔丝层与由一系列介电层隔开的一系列图案化导体层电连接,其中,至少一个熔丝层形成在绝缘层上。水平不低于微电子制造中的一系列图案化导体层中的最高者。当在前述约束的范围内形成时,提供了用于致动微电子制造内的至少一个熔丝层的增强的通道。

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