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Interferometry method and apparatus for producing lateral metrology images
Interferometry method and apparatus for producing lateral metrology images
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机译:用于产生横向计量图像的干涉测量方法和设备
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摘要
A method including: generating a sequence of phase-shifted interferometry images of an object surface relative to a reference surface; and calculating an unequally weighted average of the phase-shifted interferometry images to produce a final image. The final image can be useful as a lateral metrology image. The method may further include calculating a surface topography image from the sequence of phase-shifted interferometry images. Embodiments further include apparatus related to the method.
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