METHOD AND DEVICE FOR CONTROL OF THE DATA FLOW ON APPLICATION OF RETICLES IN A SEMICONDUCTOR COMPONENT PRODUCTION

摘要

The invention relates to a method and a device for control of the data flow on application of reticles in a semiconductor component production, characterised in that the reticles each have a unique structured reticle data set, whereby the content of the reticle data set can be automatically altered and/or completed, depending on the production process for a semiconductor component. The application of reticles in a semiconductor component production can thus be efficiently controlled.