Tray-wafer rack for handling semiconductor wafers, includes guide device for guiding withdrawn tray

摘要

A tray-wafer rack (100,200) has a withdrawable tray (110,112) which is designed to receive a wafer (124,126) and a guide device (114) for guiding the withdrawable tray (110,112). An actuator device (118,118a) is provided for pulling the tray out into a withdrawn state and for returning the tray into an inserted state. Independent claims are given for the following: (A) A tray for receiving a wafer. (B) A method for treating a wafer.