POSITION MEASUREMENT AND ARRANGEMENT METHOD, INSTALLATION REFERENCE ELEMENT DEVICE, POSITION MEASURING DEVICE AND OPTICAL PART

摘要

PROBLEM TO BE SOLVED: To provide a method and device for measuring a position for accurately three-dimensionally arranging an optical part.;SOLUTION: In the position measurement method, installation reference elements 20 are accurately arranged on a bread-board by using straight edge rulers 30, 31 and fixing clamps 32. The junction parts 21 of the bottom faces of the installation reference elements 20 are made of an elastically deformable material so as not to be influenced by the irregularities of the bread-board. Then, it becomes possible to accurately arrange optical parts by attaching a position measuring device to the reference position elements 20. Positioning accuracy of 10 μm is realizable by using an inexpensive measuring device for general use such as a micrometer and slide calipers. The positioning accuracy is 30 times accurate to 300 μm surface irregularities of an optical surface plate, and adjusting time is reduced accordingly.;COPYRIGHT: (C)2005,JPO&NCIPI