ELECTROSTATIC CHUCK AND APPARATUS FOR MANUFACTURING BONDED SUBSTRATE USING IT

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic chuck capable of flexibly meeting the changes of the arrangement of an alignment mark accompanied by the change of the shape of a substrate and the change of the position of an ultraviolet light irradiating part without changing the electrostatic chuck.;SOLUTION: An electrostatic chuck has an internal electrode 9 formed on a base comprising a dielectric substrate and covered by a dielectric film whose upper surface is a chucking surface for mounting an object 2 to be chucked. At least a part of the base and the dielectric film transmit a light having a predetermined wavelength band.;COPYRIGHT: (C)2004,JPO&NCIPI