Electrostatic chuck, electrostatic chucking device, method of manufacturing the electrostatic chuck, chuck vacuum, vacuum chucking device, method of manufacturing a vacuum chuck, ceramic heater, ceramic heater apparatus, and method for producing a ceramic heater

摘要

PROBLEM TO BE SOLVED: To provide a ceramic substrate board that makes up an electrostatic chuck etc., employed as a semiconductor producing device, the ceramic substrate board having a recess on the reverse surface thereof with a pin terminal joined by means of brazing in such a configuration as to protrude from the reverse surface in the interior of the recess, and that is adapted to have a high planarity on the reverse surface.;SOLUTION: A pin terminal 31 is made up of: an anchor member 32 brazed in the interior of the recess 6 on a reverse surface 4 of the substrate board 2 in such a configuration as not to be protruded from the reverse surface 4; and a tip-side member 36 joined with the anchor member 32 by screwing-in. In the event that a warpage is caused in the substrate board 2 as a result of brazing the anchor member 32, it is possible to make surface polishing of the reverse surface 4 as well at this stage. Thus, it is possible to obtain a high-planarity ceramic substrate board by screwing the tip-side member 36, which constitutes the pin terminal, into the anchor member 32 after the surface polishing, although the ceramic substrate board 2 is configured such that a pin terminal 31 protruded from the reverse surface 4 is formed through brazing.;COPYRIGHT: (C)2007,JPO&INPIT