ELECTROSTATIC CHUCK, ELECTROSTATIC CHUCK DEVICE, AND METHOD OF FABRICATING ELECTROSTATIC CHUCK, VACUUM CHUCK, VACUUM CHUCK DEVICE AND METHOD OF FABRICATING VACUUM CHUCK, AND CERAMIC HEATER, CERAMIC HEATER DEVICE AND METHOD OF FABRICATING CERAMIC HEATER

摘要

PROBLEM TO BE SOLVED: To provide a ceramic substrate board that makes up an electrostatic chuck etc., employed as a semiconductor producing device, the ceramic substrate board having a recess on the reverse surface thereof with a pin terminal joined by means of brazing in such a configuration as to protrude from the reverse surface in the interior of the recess, and that is adapted to have a high planarity on the reverse surface.;SOLUTION: A pin terminal 31 is made up of: an anchor member 32 brazed in the interior of the recess 6 on a reverse surface 4 of the substrate board 2 in such a configuration as not to be protruded from the reverse surface 4; and a tip-side member 36 joined with the anchor member 32 by screwing-in. In the event that a warpage is caused in the substrate board 2 as a result of brazing the anchor member 32, it is possible to make surface polishing of the reverse surface 4 as well at this stage. Thus, it is possible to obtain a high-planarity ceramic substrate board by screwing the tip-side member 36, which constitutes the pin terminal, into the anchor member 32 after the surface polishing, although the ceramic substrate board 2 is configured such that a pin terminal 31 protruded from the reverse surface 4 is formed through brazing.;COPYRIGHT: (C)2007,JPO&INPIT