首页> 外国专利> CUTTING DEVICE AND CUTTING METHOD FOR PHOTORESIST MASTER DISK, METHOD FOR MANUFACTURING STAMPER, AND METHOD FOR MANUFACTURING OPTICAL RECORDING MEDIUM

CUTTING DEVICE AND CUTTING METHOD FOR PHOTORESIST MASTER DISK, METHOD FOR MANUFACTURING STAMPER, AND METHOD FOR MANUFACTURING OPTICAL RECORDING MEDIUM

机译:光敏母盘的切割装​​置和切割方法,制造压模的方法以及制造光学记录介质的方法

摘要

PROBLEM TO BE SOLVED: To suppress a sudden fluctuation in an exposure state which occurs when cutting is performed at a high recording line speed.;SOLUTION: The device is provided with: a driving section 110 which rotates a photoresist master disk 200; a head section 120 which includes an objective lens 123 and irradiates the photoresist master disk 200 with a laser beam; and a wind barrier 103 which prevents the vibration of the head section 120 by shielding the side wind W and turbulence W' generated by rotation of the photoresist master disk 200. Even if the photoresist master disk 200 rotates at a high speed, the vibration of the head section 120 itself by the thus generated side wind W and turbulence W' hardly occurs. Consequently, the sudden change of the exposure state by the vibration of the head section 120 due to such wind is substantially prevented.;COPYRIGHT: (C)2004,JPO&NCIPI
机译:解决的问题:为了抑制当以高记录线速度进行切割时发生的曝光状态的突然波动。解决方案:该装置具有:驱动部分110,该驱动部分110使光致抗蚀剂母盘200旋转;头部120包括物镜123,并向光致抗蚀剂母盘200照射激光。挡风板103通过遮挡由光致抗蚀剂母盘200的旋转而产生的侧风W和湍流W'来防止头部120的振动。即使光致抗蚀剂母盘200高速旋转,其振动也不会受到阻碍。这样产生的侧风W和湍流W'几乎不会产生头部120本身。因此,基本上防止了由于这种风引起的头部120的振动引起的曝光状态的突然改变。;版权所有:(C)2004,JPO&NCIPI

著录项

  • 公开/公告号JP2004247029A

    专利类型

  • 公开/公告日2004-09-02

    原文格式PDF

  • 申请/专利权人 TDK CORP;

    申请/专利号JP20030413572

  • 申请日2003-12-11

  • 分类号G11B7/26;G03F7/20;

  • 国家 JP

  • 入库时间 2022-08-21 23:31:26

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