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CUTTING DEVICE AND CUTTING METHOD FOR PHOTORESIST MASTER DISK, METHOD FOR MANUFACTURING STAMPER, AND METHOD FOR MANUFACTURING OPTICAL RECORDING MEDIUM
CUTTING DEVICE AND CUTTING METHOD FOR PHOTORESIST MASTER DISK, METHOD FOR MANUFACTURING STAMPER, AND METHOD FOR MANUFACTURING OPTICAL RECORDING MEDIUM
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机译:光敏母盘的切割装置和切割方法,制造压模的方法以及制造光学记录介质的方法
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摘要
PROBLEM TO BE SOLVED: To suppress a sudden fluctuation in an exposure state which occurs when cutting is performed at a high recording line speed.;SOLUTION: The device is provided with: a driving section 110 which rotates a photoresist master disk 200; a head section 120 which includes an objective lens 123 and irradiates the photoresist master disk 200 with a laser beam; and a wind barrier 103 which prevents the vibration of the head section 120 by shielding the side wind W and turbulence W' generated by rotation of the photoresist master disk 200. Even if the photoresist master disk 200 rotates at a high speed, the vibration of the head section 120 itself by the thus generated side wind W and turbulence W' hardly occurs. Consequently, the sudden change of the exposure state by the vibration of the head section 120 due to such wind is substantially prevented.;COPYRIGHT: (C)2004,JPO&NCIPI
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