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METHOD FOR CUTTING PHOTORESIST MASTER DISK, CUTTING MACHINE, OPTICAL RECORDING MEDIUM, AND ITS MANUFACTURING METHOD
METHOD FOR CUTTING PHOTORESIST MASTER DISK, CUTTING MACHINE, OPTICAL RECORDING MEDIUM, AND ITS MANUFACTURING METHOD
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机译:切割光刻胶盘的方法,切割机,光学记录介质及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a method for cutting a photoresist master disk, in which the intensity and the aperture ratio of a land prepit signal are compatible.;SOLUTION: A spiral exposure area having a locally large width between exposure areas is formed by continuously irradiating a photoresist master disk 120 with a laser beam 101a for forming a groove, and a partial exposure area is formed in the locally large width area among the exposure areas by intermittently irradiating the photoresist master disk 120 with a laser beam 101b for forming a land prepit. Thus, in a lastly manufactured optical recording medium, since the land width of a part in which the land prepit is formed becomes locally large, it is difficult for the height of the land wall surface present in a boundary between the land prepit and the groove to be low. Thus, the intensity and the aperture ratio of a land prepit signal are compatible.;COPYRIGHT: (C)2004,JPO&NCIPI
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