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METHOD FOR CUTTING PHOTORESIST MASTER DISK, CUTTING MACHINE, OPTICAL RECORDING MEDIUM, AND ITS MANUFACTURING METHOD

机译:切割光刻胶盘的方法,切割机,光学记录介质及其制造方法

摘要

PROBLEM TO BE SOLVED: To provide a method for cutting a photoresist master disk, in which the intensity and the aperture ratio of a land prepit signal are compatible.;SOLUTION: A spiral exposure area having a locally large width between exposure areas is formed by continuously irradiating a photoresist master disk 120 with a laser beam 101a for forming a groove, and a partial exposure area is formed in the locally large width area among the exposure areas by intermittently irradiating the photoresist master disk 120 with a laser beam 101b for forming a land prepit. Thus, in a lastly manufactured optical recording medium, since the land width of a part in which the land prepit is formed becomes locally large, it is difficult for the height of the land wall surface present in a boundary between the land prepit and the groove to be low. Thus, the intensity and the aperture ratio of a land prepit signal are compatible.;COPYRIGHT: (C)2004,JPO&NCIPI
机译:解决的问题:提供一种切割光致抗蚀剂母盘的方法,在该方法中,焊盘预凹坑信号的强度和开口率兼容。解决方案:通过形成曝光区域之间局部宽度较宽的螺旋曝光区域,形成如下:通过用激光束101a连续地照射光刻胶母盘120以形成凹槽,并且通过用激光束101b间歇地照射光刻胶母盘120上的激光束101b来在曝光区域中的局部较大宽度区域中形成局部曝光区域。陆前坑。因此,在最终制造的光记录介质中,由于形成有焊盘预凹坑的部分的焊盘宽度局部变大,因此存在于焊盘预凹坑与槽之间的边界处的焊盘壁面的高度变得困难。低。因此,陆地预置坑信号的强度和孔径比是兼容的。;版权所有:(C)2004,JPO&NCIPI

著录项

  • 公开/公告号JP2004185693A

    专利类型

  • 公开/公告日2004-07-02

    原文格式PDF

  • 申请/专利权人 TDK CORP;

    申请/专利号JP20020349365

  • 发明设计人 TSUKAMOTO SHUJI;KAWAGUCHI YUICHI;

    申请日2002-12-02

  • 分类号G11B7/0045;G11B7/007;G11B7/24;G11B7/26;

  • 国家 JP

  • 入库时间 2022-08-21 23:28:58

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