METHOD OF MANUFACTURING STAMPER FOR OPTICAL INFORMATION MEDIUM, MASTER PHOTORESIST DISK USED FOR THE SAME, STAMPER FOR OPTICAL INFORMATION RECORDING MEDIUM AND OPTICAL INFORMATION MEDIUM

摘要

PROBLEM TO BE SOLVED: To prevent the occurrence of a defective stamper occurring due to peeling of a photoresist layer from a master photoresist disk in fabricating the stamper used for manufacturing an optical information medium.;SOLUTION: This method for manufacturing the stamper for the optical information medium is a method of manufacturing the stamper comprising manufacturing the master photoresist disk by forming the photoresist layer on a substrate, irradiating this photoresist layer with a laser beam from above the layer to form a latent image on the photoresist layer and developing this latent image to form rugged patterns, and transferring the above rugged patterns to a metallic film, in which the master photoresist disk provided with an organic matter layer verging on the photoresist layer between the substrate and the photoresist layer is used.;COPYRIGHT: (C)2003,JPO