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The integrated circuit which was formed by production method and that production method of forming the shallow insulating region in the integrated circuit
The integrated circuit which was formed by production method and that production method of forming the shallow insulating region in the integrated circuit
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机译:通过制造方法形成的集成电路以及在集成电路中形成浅绝缘区域的制造方法
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摘要
The baseplate where the baseplate (1) follows to that with ion implantation to the capacity part, (1) it includes with the annealing of the fill capacity part (7) to formation of the insulating region.
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