Ultrasonic probe, ultrasonic measurement equipment, and ultrasonic thickness measuring method

摘要

PROBLEM TO BE SOLVED: To prevent the discharge of water, to prevent restriction of a distance between a reception element and uneveness surface of a body to be measured and to prevent the existence of a material stuck to a surface from impairing the reliability of a measurement value.;SOLUTION: Bodies 1 and 2, incorporating the reception element 5 receiving an ultrasonic wave, have a space 8 storing liquid, whose conductivity of the ultrasonic wave is high in the inside. A sealing film 13 closing the space is formed at the tip face of a body 2. The sealing film 13 confines liquid. The reception element 5 is arranged so that a position can be changed freely, and the restriction of the thickness of the body being the object of measuring is relieved. Reflectance is amplified by a log amplifier, and a fine structure spectrum immediately after the rise of a waveform is separated and can be detected. Thus, the existence of the stuck material can be detected.;COPYRIGHT: (C)2001,JPO