Ultrasonic board thickness measuring method and ultrasonic board thickness measurement equipment

摘要

PURPOSE: To obtain a method and device for measuring plate thickness with ultrasonic wave with an improved reliabity ;CONSTITUTION: When an ultrasonic probe 3 is pushed against a measuring surface 1a, it detects that the ultrasonic probe 3 is out of proper slope angle range α and proper vertical stroke range β. Especially when automatic mechanical measurement is conducted for an object with large level difference, high measurement reliability is assured.;COPYRIGHT: (C)1995,JPO