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Method of forming vertical mosfet with ultra-low on-resistance and low gate charge
Method of forming vertical mosfet with ultra-low on-resistance and low gate charge
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机译:具有超低导通电阻和低栅极电荷的垂直mosfet的形成方法
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摘要
A vertical trench double-diffused metal-oxide-semiconductor (DMOS) field effect transistor characterized by a reduced drain-to-source resistance and a lower gate charge and providing a high transconductance and an enhanced frequency response.
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