(Meth)acrylate esters, starting alcohols for the preparation thereof, processes for preparing both, polymers of the esters, chemically amplifiable resist compositions, and method for forming patterns

摘要

The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition. chemistry chemdraw filechemistry mol file;wherein each of R¹, R², R³ and R⁴ represents a hydrogen atom, a methyl group or an ethyl group; either one of X¹ or X² represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A¹ and A² represent hydrogen atoms, or A¹ and A² form —O—, —CH₂— or —CH₂CH₂—.