(Meth)acrylate esters, starting alcohols for the preparation thereof, processes for preparing both, polymers of the esters, chemically amplifiable resist compositions, and method for forming patterns

摘要

A (meth)acrylate represented by the following formula (1): ;wherein each of R¹, R², R³ and R⁴ represents a hydrogen atom, a methyl group or an ethyl group; either one of X¹ or X² represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A¹ and A² represent hydrogen atoms, or A¹ and A² form —O—, —CH₂— or —CH₂CH₂—, which can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol; a polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition.