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Vertical metal-semiconductor microresonator photodetecting device and production method thereof

机译:垂直金属半导体微谐振器光电检测装置及其生产方法

摘要

Device for photodetection with a vertical metal semiconductor microresonator and procedure for the manufacture of this device.;According to the invention, in order to detect an incident light, at least one element is formed over an insulating layer (2) that does not absorb this light, including a semiconductor material (6) and at least two electrodes (4) holding the element, with the element and electrode unit being suitable for absorbing this light and designed to incease the light intensity with respect to the incident light, in particular by making a surface plasmon mode resonate between the unit interfaces with the layer and the propagation medium for the incident light, with the resonance of this mode taking place in teh interface between the element and atleast one of the electrodes, with this mode being excited by the component of the magnetic field of the light, parallel to the electrodes. Application for optical telecommunications.
机译:用垂直金属半导体微谐振器进行光检测的装置及其制造程序。根据本发明,为了检测入射光,在绝缘层( 2 )不会吸收这种光,包括半导体材料( 6 )和至少两个保持该元素的电极( 4 ),其中元素和电极单元是合适的用于吸收这种光并且设计成相对于入射光增加光强度,特别是通过使表面等离子体激元模式在与层和入射光的传播介质的单元界面之间共振,并采取这种模式的共振放置在元件和至少一个电极之间的界面中,该模式由平行于电极的光磁场分量激发。光通信应用。

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