首页>
外国专利>
THERMAL ANNEAL METHOD OF MAGNETIC TUNNEL JUNCTION, AND MAGNETIC TUNNELING JUNCTION FABRICATED BY THE METHOD
THERMAL ANNEAL METHOD OF MAGNETIC TUNNEL JUNCTION, AND MAGNETIC TUNNELING JUNCTION FABRICATED BY THE METHOD
展开▼
机译:磁隧道结的热退火方法及通过该方法制造的磁隧道结
展开▼
页面导航
摘要
著录项
相似文献
摘要
A fabrication method of a magnetic tunnel junction includes the steps of: forming a magnetic tunnel junction constructed having a first magnetic layer (15), a tunnel barrier (16) formed at an upper surface of the first magnetic layer and a second magnetic layer (17) formed at an upper surface of the tunnel barrier; and thermally treating the junction rapidly for 5 seconds SIMILAR 10 minutes at a temperature of 200 SIMILAR 600 DEG C to re-distribute oxygens in the tunnel barrier and make the interface between the tunnel barrier and the magnetic layer to be even. The tunneling magnetoresistance and thermal stability of the magnetic tunnel junction can be improved through the rapid thermal annealing. IMAGE
展开▼