200 300 Wafer carrier for both 300 mm wafer and 200 mm wafer

摘要

PURPOSE: A wafer carrier for both 200 millimeter and 300 millimeter wafers is provided to simultaneously fabricate the 200 millimeter and 300 millimeter wafers by selectively storing and containing both 200 millimeter and 300 millimeter wafers. CONSTITUTION: A holder can be attached/detached to/from the inside of a 300 millimeter wafer carrier. The 200 millimeter wafer can be received in the holder(100). Slots having the same pitch as a 200 millimeter wafer cassette are formed in the holder to receive a plurality of 200 millimeter wafers. A protrusion is formed in the end of the slots of the holder so that the wafer does not move when attached to the inside of the carrier.