A high-power microwave hybrid integrated circuit

摘要

PCT No. PCT/RU96/00336 Sec. 371 Date Apr. 28, 1999 Sec. 102(e) Date Apr. 28, 1999 PCT Filed Dec. 4, 1996 PCT Pub. No. WO98/25306 PCT Pub. Date Jun. 11, 1998In a high-power microwave hybrid integrated circuit comprising package-free semiconductor devices 5 with contact pads, a dielectric substrate 1 containing holes 3 and a topological pattern on its front side and a shielding metallization 2 on its opposite side, a metallic header 4 with projections 6 adjoining the shielding metallization 2 of the dielectric substrate 1 and passing through the holes 3 thereof, said semiconductor devices 5 being mounted on the projections 6 of the header 4 such that their surfaces with the contact pads flush level with a front side of the dielectric substrate 1, a part of said contact pads being connected to the topological pattern of the metallization and a part thereof being connected to the projections 6 of the header 4, the improvements consisting in that the metallic header 4 is provided with holes 3 where its projections 6 are mounted, said projections 6 being fabricated in the form of inserts rigidly secured in said holes 3 and made of material with a thermal conductivity coefficient which is greater than the thermal conductivity coefficient of material of the metallic header 4. In so doing, the cross-sectional area of the insert 6 in the region of securing thereof in the hole 3 of the metallic header 4 is at least 8 time as high as the area of an adjoining surface of the package-free semiconductor devices 5; the contacting area of the insert 6 with a surface of the shielding metallization 2 of the dielectric substrate 1 does not exceed +E,fra 1/6+EE of its own surface area. Besides, the metallic header 4 is made of material having a thermal coefficient of linear expansion close to the thermal coefficient of linear expansion of the dielectric substrate 1.