SEMICONDUCTOR PROCESSING EQUIPMENT DIRECTLY CONNECTED TO STOCK AND PROCESS EQUIPMENT

摘要

PURPOSE: Semiconductor processing equipment directly connected to a stock and process equipment is provided to shorten an interval of time for fabricating a semiconductor by 1/4 by reducing a transfer distance between a stock and process equipment. CONSTITUTION: Semiconductor processing equipment is composed of a plurality of process equipment(110,120) and a stock(10) having a shared part with each process equipment, installed in a clean room in which a semiconductor process is performed. The process equipment and the stock are disposed in the same direction.