VOLCANO-TYPE PROBE, FABRICATING METHOD THEREOF AND PROBE CARD INCLUDING THE SAME TO EASILY CORRESPOND TO FINE PITCH INTERVAL AND VARIOUS KINDS OF PAD ARRANGEMENT

摘要

PURPOSE: A method for fabricating a volcano-type probe is provided to easily correspond to a fine pitch interval and various kinds of a pad arrangement by vertically attaching a probe to an air converter unit of a probe card. CONSTITUTION: A thin specimen of a conductive metal material with elasticity and ductility is prepared. After the specimen is located on a stage of a press apparatus with a groove, a press bar located on the stage is inserted into the groove so that the thin specimen is bent to fabricate a main body(10) of a bowl type with a center hole. A laser beam is irradiated to the lower end of the main body to make the lower end incised to be a predetermined type so that the center hole is opened to the outside and a tip part(16) including a recess part(12) and a contact part(14) is fabricated.