Capillary tube vibration optical measurement arrangement, for use with a wire bonder used in connecting semiconductor chips, has two aperture plates in a measurement body for defining the diameter of a measurement beam

摘要

Arrangement for measuring the vibration amplitude of the tip of a capillary tube (1) comprises a light source that emits a light beam (6) towards a light receiver (11) and two aperture plates (8, 10) arranged between source and receiver on the same axis (19). The aperture plates are formed from drilled holes (17, 18) in the side walls (15, 16) of a channel (14) formed in a body (13). The two aperture plates define the diameter of the light beam.