Three-axis laser interferometer for measurement of relative positions of both measurement spindles of two-arm coordinate measurement machine in region of overlap - fixes body of defined shape for carrier for reflectors on one spindle and combines remaining optical components of interferometer are with probe located on other spindle.

摘要

The measurement sensor is mounted on one spindle. A body (51) of defined shape accessible to the sensor is attached to the other spindle and its orientation can be detected in each position. The body and sensor form a triple miniature laser interferometer with its three measurement axes parallel to the coordinate directions of a Cartesian coordinate system. The body carries three measurement reflectors (37-39) associated with three interferometer axes (30-32). The remaining optical and/or electronic parts of the three laser interferometers are contained in the measurement sensing device. USE/ADVANTAGE - E.g. for checking accuracy of industrial robots. Enables continuous measurement of relative positions of measurement spindles whilst both are in motion. Space saving.