Method for measuring angular micro-deviations relative to a laser beam, preferably rotation errors of machines and the interferometer for measurements of angular micro-deviations relative to a laser beam, preferably rotation errors of machines

摘要

according to the measurement of laser beam splits into two beams.which brings to the reflections from the surfaces of differential of number in the dwuwiu0105zkowego interferometru with the reflecting surfacescreated through the prism of corner (13) and the rectangular prism (6), in which the laser beam separated into two beams (4, 5).after reflection from the surfaces both beam (4, 5) connected in a common direction propagation again so that interferuju0105 togethercreating visual striations interferencyjnych upon a photodetector (12) sensitive to change of striations.angular deviation is determined based on the registered by the photodetector changes of striations formed by interfering with each other and with pryzmatu rectangular beam (6) reflectingthe first beam (4) sweeps her radius around axis (y) perpendicular to the plane containing dwusiecznu0105 angle between planes reflective (78) pryzmatu (6) and the axis of intersection of the planes pryzmatu reflecting surfaces (7, 8).interferometr is equipped with dwuwiu0105zkowy optical system with the surfaces (3, 13, 7, 8) located between the laser (1) and polaryzatorem (11),for the photodetector (12), the number of which is variable about the number of reflecting surfaces located in the path of the second beam (5).also has a rectangular prism (6) reflecting beam, which is separated from the other components of the optical system.rotating around the axis (y) perpendicular to the plane containing dwusiecznu0105 angle between planes reflective (78) pryzmatu (6) and the axis of intersection of the planes pryzmatu reflecting surfaces (7, 8).between a prism (6) and u015bwiatu0142odzielu0105cym rectangular element (3) is an optical wedge, odchylaju0105cy beam around the y axis.