METHOD OF MOVING AND CONTROLLING SCANNER AND SCANNER COMMAND SIGNAL GENERATION DEVICE

摘要

PPROBLEM TO BE SOLVED: To propose a method of moving and controlling a scanner by which the scanner is moved at an appropriate speed according to moving modes. PSOLUTION: A scanner command signal generation device 3 of a scanner system 1 compares the scanner position command data xPn inputted to a comparator 31 with the present position data xP(n-1) of the scanner, counts with an up/down counter 32 in the direction that the two sets of data coincide and moves the scanner coupled with the count action. After the counted value xP coincides with the scanner position command data xPn, the scanner command signal generation device 3 holds the value xPn as the present position data and stops the scanner, and continues the count action at the speed decided by the frequency f given by the formula: f=K/¾xPn-xP(n-1)¾ (K:constant). PCOPYRIGHT: (C)2005,JPO&NCIPI